86-532-68960800
01 Xiaoxin Industrial Park, Daxin Town, Jimo, Qingdao, Shandong, China
Vacuum Magnetron Sputtering Coating Machine
Product Profile
Vacuum Magnetron Sputtering Coating Machine is widely used in household appliances, clocks, lamps, crafts, toys, light
reflector, phone keypad outer covering, instrumentation, plastics, glass, ceramics, tiles, decorative film and functional film. Our company’s magnetron sputtering coating machine has many advantages such as good controllability and repeatability for film thickness, strong adhesion between substrate and film, special material film coating, mixed film, compound film and TiN imitation gold film making by different materials sputtering on products’ surface at the same time, high purity films etc..
Technical Specification
Model | CK-700 | CK-900 | CK-1000 | CK-1250 | CK-1400 | CK-1600 | |||||
Vacuum chamber size | D700×H 900mm | D900×H 1100mm | D1000×H 1200mm | D1250×H 1350mm | D1400×H 1600mm | D1600×H 1800mm | |||||
Power supply | Pulse bias power supply; DC magnetron power supply | ||||||||||
Vacuum chamber structure | Vertical single/double door, back vacuum acquisition system | ||||||||||
Vacuum chamber material | SS304 superior stainless steel | ||||||||||
Ultimate vacuum | 8.0×10-4Pa | 8.0×10-4Pa | 8.0×10-4Pa | 8.0×10-4Pa | 8.0×10-4Pa | 8.0×10-4Pa | |||||
Pumping speed | From atmosphere to 6.7×10-3Pa spend 8~15min (no-load) | ||||||||||
Vacuum system | Diffusion pump + roots pump + rotary vane pump + holding pump (can be adjusted) | ||||||||||
Magnetron target type | Planar magnetron target, cylindrical magnetron target | ||||||||||
Pulse bias power supply | 25KW | 25KW | 30KW | 30KW | 40KW | 40KW | |||||
Rotation mode | Planetary revolution and rotation and frequency conversion speed regulation (controlled and adjustable, up-down rotation shelves, axes number is determined by actual situation) | ||||||||||
Process gas | Mass flow controller (3-4 road), manual or automatic filling system | ||||||||||
Cooling system | Water-cooling circulatory system,cooling water tower or industrial cooling water machine is also needed (supplied by customer) | ||||||||||
Control mode | Manual or PLC + touch screen | ||||||||||
Alarm and protection | Water pressure alarm, atmosphere pressure alarm, over current protection, related protective measures and electrical interlock functions. | ||||||||||
Cover area | W3m× L3.5m | W3m× L3.5m | W3.5m× L5m | W3.5m× L5m | W4.5m× L5.5m | W4.5m× L5.5m | |||||
Other data | Water pressure≥0.2MPa, water temperature≤25℃, atmosphere pressure 0.5-0.8MPa | ||||||||||
Remark | Specific configuration size can be designed according to customer requirements. Another power supply can be equipped such as IF power supply and arc power supply to meet the different requirements. Customizable vacuum chamber size range is D 500-3000mm, H: 500-3000mm. | ||||||||||
Dear sir:
