86-532-68960800
01 Xiaoxin Industrial Park, Daxin Town, Jimo, Qingdao, Shandong, China
Vacuum magnetron sputtering coating machine
Vacuum magnetron sputtering coating machine is widely used in household appliances, clocks, lamps, crafts, toys, light reflector, phone keypad outer covering and instrumentation, plastics, glass, ceramics, tiles and other decorative film and functional film. Our company's magnetron sputtering machine has many advantages such as good controllability and repeatability for film thickness; strong adhesion between substrate and film; making special material film and let different materials sputtering on products’ surface at the same time, then will make mixed film, compound film, TiN imitation gold film; high purity films etc..
Specification
Model | CK-700 | CK-900 | CK-1000 | CK-1250 | CK-1400 | CK-1600 |
Vacuum chamber size | D700×H 900mm | D900×H 1100mm | D1000×H 1200mm | D1250×H 1350mm | D1400×H 1600mm | D1600×H 1800mm |
Power supply | Pulse bias power supply; DC magnetic power supply | |||||
Vacuum chamber structure | Vertical single/double door, back vacuum acquisition system | |||||
Vacuum chamber material | SS304 superior stainless steel | |||||
Ultimate vacuum | 8.0×10-4Pa | 8.0×10-4Pa | 8.0×10-4Pa | 8.0×10-4Pa | 8.0×10-4Pa | 8.0×10-4Pa |
Pumping speed | From atmosphere to 6.7×10-3Pa spend 8~15min (no-load) | |||||
Vacuum system | Diffusion pump + roots pump + rotary vane pump + holding pump (can be adjusted) | |||||
Magnetic target type | Planar magnetic target, cylindrical magnetic target | |||||
Pulse bias power supply | 25KW | 25KW | 30KW | 30KW | 40KW | 40KW |
Rotation mode | Planetary revolution and rotation and frequency conversion speed regulation (controlled and adjustable, up-down rotation shelves, axes number is determined by actual situation) | |||||
Process gas | Mass flow controller (3-4 road), manual or automatic filling system | |||||
Cooling system | Water-cooling circulatory system,cooling water tower or industrial cooling water machine is also needed (supplied by customer) | |||||
Control mode | Manual or PLC + touch screen, fully automatic | |||||
Alarm and protection | Water pressure alarm, atmosphere pressure alarm, over current protection, related protective measures and electrical interlock functions. | |||||
Cover area | W3m× L3.5m | W3m× L3.5m | W3.5m× L5m | W3.5m× L5m | W4.5m× L5.5m | W4.5m× L5.5m |
Other data | Water pressure≥0.2MPa, water temperature≤25℃, atmosphere pressure 0.5-0.8MPa | |||||
Remark | Specific configuration size can be designed according to customer requirements. Another power supply can be equipped such as IF power supply and arc power supply to meet the different requirements. Customized vacuum chamber size range is D 500-3000mm, H: 500-3000mm. | |||||
Standard wooden packaging
Under customer's request
Warranty: 1year
Engineers available to service machinery overseas
Our company is specialized in various upgrading high vacuum ion plating equipment manufacturing and sales , PVD coating processing, vacuum accessories sales and a variety of old and new equipment for the high-tech enterprise , the company's main products are: IF power , including the power vacuum , magnetic control sputtering power , bias power ; multi-arc ion plating equipment , frequency ion plating equipment , ceramic glass coating equipment , magnetron evaporation coating equipment , continuous web coating line single machine ; can be configured according to user needs multi-arc target rotation magnetron target , IF twin sputtering target , unbalanced magnetron sputtering target and the arc column , large flat arc , multi-target can be achieved in a room , and can be equipped with advanced computer automatic control system , fully automated process control . The main target : gold, silver, chromium, titanium, titanium, aluminum , zirconium , nickel, stainless steel and high-purity target ink , silicon, silicon oxide , aluminum oxide , nitride, boride and other non-metallic ceramic target ; Color: includes gold series , silver series , series and black color series ; applications: hard film , decorative film, a metal film , a conductive film, a metal and non-metallic surface . The philosophy of " customer first, excellence " business philosophy, the " customers first " principle to provide our clients with quality services.
Accessories:
Diffusion pump, rotary vane pump, roots pump, holding pump, pulse magnetron sputtering power,unipolar pulse power, frequency magnetron power, DC magnetron power, vacuum gauge, flange etc..
Michelle Qiu
Tel / Whatsapp: 0086 18906391496
QQ: 2728620437
Skype: Michelle.y Qiu
