86-532-68960800
01 Xiaoxin Industrial Park, Daxin Town, Jimo, Qingdao, Shandong, China
Magnetron Sputtering Vacuum Coating Machine
Type | CK-700 | CK-900 | CK-1000 | CK-1250 | CK-1400 | CK-1600 | |
Vacuum chamber size | 700×H 900mm | 900×H 1100mm | 1000×H 1200mm | 1250×H 1350mm | 1400×H 1600mm | 1600×H 1800mm | |
Power supply | Pulse bias power supply; DC magnetron power supply (can be equipped with different power supply by requested) | ||||||
Vacuum chamber structure | Vertical single/double door, rear vacuum acquisition system | ||||||
Vacuum chamber material | SUS-304 superior stainless steel | ||||||
Ultimate vacuum | 8.0×10-4Pa | 8.0×10-4Pa | 8.0×10-4Pa | 8.0×10-4Pa | 8.0×10-4Pa | 8.0×10-4Pa | |
Pumping speed | From 1 atm to 6.7×10-3Pa take 8~15min (room temperature, clean and unload) | ||||||
Vacuum system | Diffusion pump + roots pump + rotary vane pump + holding pump (can be adjusted by requested) | ||||||
Magnetron target type | Planar magnetron target, cylindrical magnetron target | ||||||
Pulse bias power supply | 25KW | 25KW | 30KW | 30KW | 40KW | 40KW | |
Shelves rotation system | Planetary revolution and rotation, frequency control, upper and base rotation shelves, number of axes equipped by requested. | ||||||
Process gas | Mass flow controller (3-4 ways), manual or automatic processing gas systems | ||||||
Cooling system | Water-cooling system. Cooling water tower, industrial cooling water machine or deep water cooling system is needed to purchase separately. ( or supplied by user) | ||||||
Control system | Manual or PLC + touch screen | ||||||
Alarm and protection | Water pressure alarm, air pressure alarm, over current protection, execution on related protective measures and electrical interlock systems. | ||||||
Foot print | W3m× L3.5m | W3m× L3.5m | W3.5m× L5m | W3.5m× L5m | W4.5m× L5.5m | W4.5m× L5.5m | |
Other technical data | Water pressure≥0.2MPa, water temperature≤25℃, air pressure 0.5-0.8MPa | ||||||
Remarks | Specific size can be designed by user’s requested. Customizable vacuum chamber size range: 500-3000mm, H: 500-3000mm. | ||||||
Color: gold, rose gold, black gold, silver, champagne gold,sapphire blue, black, etc.
Coating: TiN,CrN,ZrN,TiCN,AlCrN,AlTiN,TiALN and DLC
Remark: Specially tailored according to customers’ products and process requirements.
quick pumping speed
stable vacuum environment
large load capacity
uniform coating film
environmental friendly
SAMPLES:
Question 1: Are you manufacturer?
Answer: Yes, We are aCE, ISO,SGS certification manufacturer. Welcome to visit our factory at anytime!
Question 2:Are engineer avaliable to client end?
Answer: Yes. Engineer avaliable to oversea for trainning .
Question 3: What is price of the machine?
Answer:
The machine is custom made.But we still have price range for reference based on the system we have made.
If you have any drawing or any information on specification of the machine, please send to us for quote.
If you are totally new in this area, please tell us the max. dimension of your products, its application, and your desired capacity.
Our team will provide our professional suggestions and work out an appropriate design for your project.
Question 4: Do the machine easy to use and maintainance ?
Answer: Yes. We alway focus on intelligent operation and high quality deliver to reduce maintainance.But anyway we have 1year warranty for clients. and smart design make easy to control. named components make circuit protection system more safety.
Question 5: Do I have to pay the costs for pollution?
Answer: The machine is environment-friendly, there is no liquid chemical waste and harmful gas. This is a kind of green technology.
When you are going to send us a inquiry, in order to design the most appropriate machine for your project, please answer the following questions in your letter:
1. What is your product, its material and application?
2. What is the possible max. dimension of your product?
3. What is your desired productivity per 8 hours/shift?
The answers to the above question will help us a lot on designing or do the recommendation.
Welcome to inquiry our vacuum coating machines.
We have high quality products and services. And we can provide coating for your products.
Welcome to visit the factory.
Please send us your detailed requirements. We will provide the best solution for you.
